As represented the substrate materials and optical materials in current light-technology industry-focused IT industry, such as sapphire (Al2O3), silicon carbide(SiC), optical glass, lithium niobate(LiNbO3), and lithium tantalate(LiTaO3), obtain a wide range of applications and a good development prospect. Single crystal materials such as sapphire (Al2O3), silicon carbide is widely used in light-emitting diode (LED) substrate material.
This research aimed the ultra-precision polishing technology and chemical mechanical polishing slurry for industrial research to develop suitable substrate materials and optical materials, polishing techniques and high-end polishing slurry, and gradually replace imported, and enhancing the manufacturing level and processing technologies.