Equipment
Ongoing Researches
IC Planarization
Polishing of hard disk substrate
Polishing of Metallic Materials
Polishing of semiconductor materials
Polishing of Compound materials
Micro-nano-materials
Main Achievements
Cooperated Development
Sample Testing Services
Your current location：
Home
>
Scientific research
>
Ongoing Researches
>IC Planarization
IC Planarization
The development of integrated circuits(IC), especially the exploration of ultralarge integrated circu...
Total
1
Page Total
1
Article Information
Home
Previous
Next
Last
地址：深圳高新技术产业园南区深圳清华大学研究院C区708室 电话：0755 - 2695 7638 传真：0755 - 2695 7008
粤ICP备07000681号-2