Silicon-based semiconductor-specific materials has been the most important foundation for functional materials in the electronic information industry, Plays an important role in the national economy and the military industry. In order to meet the technical requirements of IC technology, high-quality polished mono-crystalline silicon wafers is the basic condition.

Our lab has been going on for many years in IC silicon wafer polishing slurry research field. The key technical indicators of development slurry, total thickness variation, micro-roughness and polishing slurry cycle life get a breakthrough. To meet or exceed international advanced technical level of polishing slurry, the relevant Slurry access to application in 6-inch silicon wafers polishing production line, replace the imported slurry.