The product is applied in primary polishing of GaAs.

Polishing removal rate of the slurry is high (above 1μm/min).The surface quality of polished surface is good and the surface is none-dot corrosion, pit and scratch.

The product is stable and the polishing life is long. It doesn’t erode equipment.

【Parameter】

pH：9.5～11.5

Density：1.1-1.2

Diameter of abrasive：40～60nm

Concentration of abrasive：25-30%

Viscosity：below 25c.p

【Storage instruction】

① Avoid light in the storage.

② Storage temperature is 0～30℃.

③ The shelf life of the slurry could be postponedto one year.
④ Avoid adding to strong electrolyte