This product is suitable the semiconductor materials such as silicon wafer surface first/ second polishing, The most notable feature is it can be reused many times and the material removal rate reach 0.9μm/min, material removal rate and the surface quality are maintained at a constant level in the recycling the process of polishing, which can greatly reduce the cost of polishing slurry. The surface roughness of polished wafer below 0.2nm, the polished wafers pass rate reach 95% in the famous trial production line. The recycle time is more than 60h, has exceeded its production and application requirements. The slurry can completely replace the existing foreign similar imported products.
【Appearance】
Milky white or light blue transparent slurry.
【Technical Specifications】 Content (as SiO2% total) --------------- 15% ~ 25% pH, ---------------------------------------- 10.8 ~ 11.8 Proportion (20oC) ------------------------- 1.10 ~ 1.20 Size ------------------------------------------ 10nm ~ 25nm Viscosity (20 oC) -------------------------- less than 25c.p 【Usage】Before use, the silicon wafer polishing slurry is diluted with deionized water to 20-fold. 【Packing】soft bag packing, 19 kg / bag. 【Shelf Life】12 months. 【Storage】1. Stored in dark and ventilate place. 2. Storage Temperature 0 ~ 30oC. 【Note】1. Use wear gloves, masks, goggles, and clothes and other protective equipment to avoid skin and eye in direct contact with the slurry. 2. Using the slurry in the ventilation and avoid inhalation of the volatile gases out of the slurry. 3. Such as physical contact with the slurry and immediately take the necessary measures. 【First Aid】1. If contact with eyes, immediately flush eyes( including the eyelids) with plenty of water for at least 15 minutes, Call a physicianif necessary. 2. If contact with the skin, immediately flush skin with plenty of water, Call a physicianif necessary.3. If inhaled volatile gases, remove to fresh air. If not breathing, give
artificial respiration. If breathing is difficult, give oxygen and call a physician.