The product is applied in final polishing of GaAs.

Polishing removal rate of the slurry is fairly high (above 0.4μm/min).The surface quality of polished surface is good and Roughness (Ra) of the surface is low (below 5?). The surface is none-dot corrosion, pit and scratch.

The product is stable and the polishing life is long. It doesn’t erode equipment.

【Parameter】

pH：9.5～11.5

Density：1.1-1.2

Diameter of abrasive：20～40nm

Concentration of abrasive：25-30%

Viscosity：below 25c.p

【Storage instruction】

① Avoid light in the storage.

② Storage temperature is 0～30℃.

③ The shelf life of the slurry could be postponed to one year.

④ Avoid adding to strong electrolyte.